ENGR 40433 Introduction to Microelectromechanical System (MEMS)
Prerequisites: ENGR 20404 and ENGR 20603. Micro Electro Mechanical Systems (MEMS) are miniature devices that are widely used in industrial and consumer products such as accelerometers, used in cars to activate the airbags and in smart phones to flip images and play video games. This course will cover the fundamentals of MEMS including the design and modeling, fabrication, actuation and sensing, packaging, testing and characterization as well as reliability. The applications and challenges of existing MEMS devices will be discussed.